??蝘?(eihan tech)/瞈?撌乩???wet bench)/?飛撌乩???chemical hood)/?飛靘蝟餌絞(chemical supply system)/?閮剖?(etching tank)/瘝?閮剖?(QDR)/敺桅摮祕撽恕閮剖?(microelectronics lab)/暺?摰?photoroom)/?憛?璈?spin coater)/?蔗(main mask)/摮?蝵?Duplicate mask)/??璈?exposor machine)/???photoresist)